Products:
MBE-LEED
Low Temperature Head..............
3-4 Crucible Evaporator
9 Crucible Evaporator
Ion Source
L. Proj. Pattern
Tunneling Tips
organic Molecules
Services:
Vacuum systems
Plasma etching
Consulting
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UHV system for: VT-STM, SPA-LEED, XPS/UPS Electroluminescence |
Two chamber system for investigations in the field of surface science and applied physics (multilayer films with optical and electric functions)
- Designed by Dr. C. Seidel (1995)
- Manufactured by the mechanical workshop of Münster University
- Residual pressure in all chambers 1*10-10mbar, STM chamber 7*10-11mbar
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| Pumps: Rotary Vane Pumps, Ion Pumps, Titanium Sublimation Pumps, and magnetically borne Turbomolecular Pump |
Special features:
- Two lock-in systems for transfer of complete functional units with up to 6 electrical contacts
- Organic luminescence diodes can be produced and measured without breaking the vacuum
- Separation of preparation area to SPA-LEED and XPS/UPS areas
- Highly resolved photoelectron spectroscopy by using nonmagnetic stainless steel
- Highly resolved electron diffraction pattern
- Simultaneous preparation and VT-STM investigations