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Ion Source

A ion source which is essential on most surface analysis instruments.

We offer an ion source with energy range up to 500eV for Ar, Xe. The low energie allows careful cleaning also for metal single crystals.

Features:

  • differential noble gas supply
  • adjustable of filament current, emission (controlled by electronic circuit) beam energy, focus and anode voltage
  • display of all parameters including target current
  • two filaments.
  • NW 38 CF mounting flange
Electronics parts
ion source power supply

Fig. Power supply for the ion source. Emission and target current are displayed with bar diagram. Illumination of the display can be dimmed








kentax UHV equipment, www.kentax.de, info@kentax.de,
Tel. ++49(0)5137 9078 84, Fax: ++49(0)5137 9078 86