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Test patterns (Fischer sample) for scanning probe microscopy. The projection patterns can be used for resolution control (in a range of 10 nm to 1000 nm) and lateral calibration. Monolayers of hexagonal close packed latex spheres, deposited on suitable substrates, are used as a mask for physical vapour deposition. In this way, it is possible to record complete phase diagrams representing the development of a layer system. Owing to the geometrical adaptation, the crucibles obscure the usable viewing area only to a very small degree.
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