Products:
3-4 Crucible Evaporator
9 Crucible Evaporator
Metal Evaporator
MBE-LEED
Low Temperature Head
Ion Source
L. Proj. Pattern
Organic Molecules
Services:
Vacuum systems
Plasma etching
Consulting
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plasma etching |
During plasma activation and coating of surfaces, problems can occure caused by the vacuum equipment, by the state of the used plasma or of the samples.
We offer you advice and solutions if you are affected with such problems.
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Ar plasma etching of polycarbonate. a) plasma source, b) sample, c) mass spectroscopy |
Further information:
The suppression of water-diffusion in polycarbonate through Ar- and He-plasma as a new model for the origin of improved adhesion of Al M.M. Schäfer, C. Seidel, H. Fuchs, M. Voetz, Applied Surface Science 173 (2001) 1-7
An XPS and SFM study of plasma treatment and Al metallisation of PC: A comparison of SF6 and Ar plasma etching H. Kopf, C. Seidel, B. Gotsmann and H. Fuchs Polymer Surface Modification: Relevance to Adhesion, Vol. 2, (2000), pp. 173-181
Ar plasma treated and Al metallised polycarbonate: A XPS, Mass Spectroscopy and SFM Study C. Seidel, H. Kopf, B. Gotsmann, T. Vieth, K. Reihs and H. Fuchs, Appl. Surface Science 150 (1999) 19-33
Aluminium deposition on SF6 plasma-treated polycarbonate: an AFM, XPS and mass spectroscopy study. C. Seidel, B. Gotsmann, H. Kopf, K. Reihs and H. Fuchs Surface & Interface Analysis, vol.26, no.4, (1998), pp. 306-15.