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This evaporator contains four heater cells inside which are identical to the other products. The TCE-S evaporator is equipped with a shutter that allows instant stopping of the coating process. The TCE-SC evaporator is additionally equipped with a cooling system, which enables a longer evaporation time at higher temperatures.
Due to the need of two flanges backside for electrical-, cooling- and rotary- feed through, a Flange Multiplexer is used.
The TCE-BS and TCE-BSC with cooling are the complete versions of the 4-cell evaporator. Equipped with an additional corner- and gate- valve, four materials can be exchanged without breaking the vacuum of the main chamber.
The following data sheets show temperature curves of one driven heater element whereas the other three elements are not heated but recorded in their temperature. From these diagrams you can see how long a crucible can be heated before the neighboring crucible (with its material) reaches the maximum allowed temperature.
Overview
Overview
Temperature curves from 30° - 450°C without cooling (left diagram) and from 30° - 950°C with cooling (right diagram). The diagram shows the thermal characteristic of the four cells, if one cell is heating. The cell on the opposite site of the heated cell indicate the lowest crosstalk.
50 °C
150 °C
250 °C
350 °C
450 °C
550 °C
650 °C
750 °C
850 °C
950 °C
Temperature curves cooled/uncooled at different final temperatures from T set value 50°C, 150°C , 250°C, 350°C, 450°C and only cooled value 550°C, 650°C, 750°C, 850°C and 950°C.
All data sheets in one PDF file: data-sheets-kentax.pdf (new window)